Patents recorded as loan collateral (security interest)

Conveyance: SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). | Assignor: AXCELIS TECHNOLOGIES, INC. | Assignee: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT | Patents: 10832926, 10774419, 11114270, 10720354, 10794694, 10714296, 11011397, 11728187, 10714317, 10847339, 10903097, 11062873, 11114330, 11037754, 11646175, 11170967, 11183365, 11670483, 11756772, 6428262, 6476399, 6485534, 6541781, 6583421, 6583429, 6583544, 6600163, 6608315, 6635890, 6653643, 6653803, 6657209, 6661016, 6663333, 6677598, 6703628, 6710360, 6734439, 6735378, 6740894, 6759098, 6759665, 6768121, 6770888, 6774377, 6774378, 6777696, 6828572, 6835930, 6872953, 6881966, 6903350, 6921907, 6940079, 6946403, 6947274, 6947665, 6949895, 6953942, 6956225, 6958481, 6984832, 6987269, 6987272, 6989545, 6992308, 6992309, 6992310, 6992311, 7010388, 7011868, 7019314, 7022984, 7030395, 7064340, 7072165, 7072166, 7078707, 7078712, 7102146, 7105840, 7112809, 7135691, 7141809, 7151658, 7227160, 7239242, 7246985, 7247863, 7321299, 7323695, 7329882, 7344352, 7358508, 7361914, 7361915, 7375355, 7381969, 7381977, 7402821, 7417242, 7423277, 7435971, 7435977, 7453074, 7453160, 7473909, 7476855, 7476876, 7507977, 7507978, 7511287, 7528390, 7531819, 7547898, 7547899, 7550751, 7557363, 7560705, 7566886, 7566887, 7579604, 7586111, 7589333, 7598495, 7598505, 7615763, 7629272, 7629597, 7655930, 7678682, 7683348, 7692164, 7696494, 7699574, 7701230, 7704872, 7705328, 7709814, 7714406, 7728293, 7748344, 7750314, 7750320, 7751172, 7759657, 7789443, 7800083, 7828504, 7842931, 7858955, 7897944, 7888661, 7915597, 7924159, 7947966, 7949425, 7952851, 7973290, 7977628, 7982195, 7994487, 7994488, 8008636, 8023247, 8035080, 8071451, 8071964, 8080814, 8089052, 8124946, 8124947, 8138484, 8168941, 8193513, 8226142, 8227768, 8227773, 8228658, 8237135, 8241425, 8242469, 8524584, 8270142, 8278634, 8330129, 8350236, 8344337, 8378313, 8421039, 8422193, 8450701, 8481969, 8500382, 8502173, 8604418, 8637838, 8653486, 8669517, 8692215, 8760054, 8779395, 8797706, 8803110, 8902560, 8932430, 8933424, 8941968, 8963107, 9006690, 9036326, 9048276, 9064673, 9111719, 9147554, 9218941, 9236216, 9281227, 9318302, 9378992, 9443698, 9455116, 9490185, 9502207, 9543110, 9558914, 9558980, 9607803, 9611540, 9620327, 9711329, 9633885, 9679739, 9711324, 9711328, 9805912, 9842752, 9847240, 9870893, 9871473, 9911636, 9941087, 9953801, 9978555, 9978599, 9984855, 10024825, 10037877, 10041789, 10074508, 10087520, 10128084, 10170286, 10186446, 10227693, 10256069, 10324121, 10342114, 10361069, 10361081, 10395889, 10395891, 10403503, 10483086, 10515780, 10535498, 10553392, 10573485, 10573541, 10580616, 10676370, 10679818, 10689752, 10692749, 10714296, 10714317, 10720354