Patents recorded as loan collateral (security interest)

Conveyance: SECURITY AGREEMENT | Assignor: AXCELIS TECHNOLOGIES, INC. | Assignee: SILICON VALLEY BANK | Patents: 7421973, 7748344, 7485190, 7629272, 8580076, 7794663, 7821655, 7892357, 7449416, 7453160, 7699574, 7982195, 7678682, 7704872, 7709814, 7417242, 7488958, 7598505, 7692164, 7381651, 7845310, 7547899, 7598495, 7381977, 7423277, 7435977, 7579604, 7547898, 7453074, 7361915, 7476876, 7358508, 7361914, 7435971, 7375355, 7511287, 7402821, 7531819, 7828504, 7589333, 8803110, 7550751, 7629597, 7476855, 7696494, 7949425, 7557363, 7751172, 7728293, 7507977, 7507978, 7615763, 7714406, 7381969, 7399980, 7750320, 7528390, 7473909, 7586111, 7566886, 7385799, 8228658, 7701230, 7683348, 7789443, 7560705, 8422193, 7655930, 7566887, 8500382, 7924159, 7800083, 8338315, 7705328, 7888661, 4883968, 4891525, 4914305, 4923584, 4929840, 4943728, 4944860, 4952299, 4971653, 4975586, 4978891, 4987933, 5005519, 5015331, 5019233, 5023458, 5026997, 5031674, 5091655, 5113074, 5118989, 5134299, 5156681, 5160846, 5164599, 5177366, 5198676, 5209803, 5218210, 5227698, 5229615, 5240046, 5308989, 5361274, 5373164, 5406088, 5412684, 5420415, 5432352, 5436790, 5438242, 5444597, 5497006, 5498308, 5523652, 5525807, 5531420, 5554854, 5554857, 5571439, 5608223, 5633506, 5654043, 5656092, 5661308, 5670217, 5674039, 5691537, 5703372, 5703375, 5736743, 5751003, 5760405, 5760409, 5763890, 5767626, 5780863, 5791782, 5793050, 5811823, 5814819, 5814823, 5820366, 5821677, 5825038, 5828070, 5856674, 5895923, 5900177, 5903009, 5909031, 5911832, 5959305, 5961323, 5961851, 5962858, 5980638, 5998798, 6016036, 6023555, 6025602, 6031320, 6040518, 6050218, 6057084, 6057645, 6060718, 6065499, 6082374, 6101971, 6107634, 6110288, 6117622, 6122440, 6135128, 6137112, 6180954, 6183127, 6194734, 6204508, 6207963, 6207964, 6208095, 6214524, 6221169, 6222196, 6225745, 6228773, 6231054, 6237527, 6242747, 6242750, 6255662, 6259072, 6259105, 6262638, 6263830, 6273956, 6281135, 6288403, 6291828, 6294862, 6302963, 6305316, 6332709, 6347919, 6352050, 6352936, 6375348, 6406836, 6409932, 6412438, 6414329, 6417115, 6429139, 6439155, 6441382, 6452196, 6458430, 6461036, 6461801, 6476399, 6479828, 6485534, 6492186, 6499777, 6503366, 6503693, 6515290, 6524936, 6525326, 6534775, 6541781, 6547458, 6548416, 6552892, 6558755, 6576300, 6580082, 6582891, 6583428, 6583429, 6583544, 6585908, 6593699, 6597003, 6605226, 6605484, 6610968, 6630406, 6635117, 6635890, 6638875, 6653643, 6653803, 6657209, 6660975, 6663333, 6664547, 6664548, 6664737, 6673197, 6677598, 6695886, 6709807, 6710360, 6734120, 6735378, 6740894, 6753506, 6756085, 6759098, 6759665, 6761796, 6768084, 6768121, 6770888, 6774373, 6774377, 6774378, 6777687, 6777696, 6779263, 6782843, 6783630, 6794664, 6796711, 6803319, 6828572, 6831280, 6833710, 6834656, 6835930, 6855916, 6872953, 6877946, 6879109, 6881966, 6881967, 6885014, 6891174, 6897615, 6900444, 6903350, 6905333, 6905984, 6913796, 6914251, 6921907, 6940079, 6946403, 6947274, 6947665, 6949895, 6951823, 6953942, 6956225, 6958481, 6984832, 6987269, 6987272, 6989545, 6992308, 6992310, 6992311, 7010388, 7011868, 7019314, 7022984, 7026581, 7030395, 7033443, 7037846, 7059817, 7064340, 7070661, 7072165, 7072166, 7078161, 7078707, 7078712, 7100759, 7102146, 7105840, 7112808, 7112809, 7119343, 7135691, 7141809, 7151658, 7163587, 7166187, 7166963, 7173260, 7183514, 7205231, 7205556, 7227160, 7239242, 7246985, 7267520, 7276712, 7321299, 7323695, 7329882, 7338575, 7344352, 6992309