Patents recorded as loan collateral (security interest)

Conveyance: SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). | Assignor: ENTEGRIS, INC. | Assignee: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT | Patents: 11446708, 11421320, 11560625, 11413586, 11572298, 11441229, 11610795, 11761081, 11742781, 11845917, 11498738, 11538687, 11465104, 11551957, 11821087, 11491435, 11712653, 11511219, 11752471, 11587810, 11421157, 11621148, 11883786, 11581209, 11788902, 11679385, 11624111, 11840645, 11772055, 11492709, 11779866, 11661249, 11837492, 11701623, 11826696, 11697767, 11820918, 11560397, 11530356, 11788007, 11612972, 11682540, 11881376, 11390943, 11339063, 11333302, 11371138, 11313482, 11346008, 11280429, 11383348, 11315791, 11273492, 11380539, 11352383, 11492364, 11312739, 11414750, 11869787, 11466038, 11309207, 11804375, 11299802, 11365351, 11594437, 11417557, 11358975, 11713252, 11708380, 11731085, 8557133, 8828874, 9218954, 9259818, 9259819, 9368367, 9551075, 9567492, 9878420, 10622192, 10640523, 10837603, 10868899, 10892137, 10895347, 11049728, 11053440, 11078380, 11085011, 11124740, 11124741, 11124746, 11139145, 11143329, 11149235, 11152219, 11203604, 11213927, 11260336, 11273492, 11280429, 11299802, 11309207, 11312739, 11315791