Patents recorded as loan collateral (security interest)

Conveyance: SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). | Assignor: ENTEGRIS, INC. | Assignee: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT | Patents: 9109188, 8849448, 9062829, 9004462, 8858685, 8679734, 8802882, 9170246, 9097611, 8951948, 9073028, 9079758, 9666435, 9455147, 8765654, 8784936, 9031683, 8679894, 9120616, 8821640, 8709863, 9337054, 8778210, 9132412, 8685909, 9991095, 8796068, 8674127, 9074170, 9074169, 8754021, 9340878, 9038855, 9070875, 9134146, 9522773, 9383064, 8733598, 9017453, 8785889, 8779383, 9012876, 9416338, 9190609, 8796131, 8882889, 9373677, 9109755, 9062828, 9238850, 9637300, 9063431, 9142387, 9205392, 9831088, 9126749, 9215813, 9045717, 10570522, 9347616, 8679231, 9269582, 9211993, 9972830, 8618036, 9126139, D702128, 9385310, 9186650, 8920571, 9820561, 9132526, 8939428, 8814536, 8870548, 8753097, 9399989, 9025454, 9309872, 9631611, 9297374, 8684705, 9354637, 8727744, 8689817, 8726935, 8844774, 9024252, 8932381, 8758887, 8777189, 8789708, 9056281, 8844909, 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